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Monocrystalline silicon for half-etching: the core consumable for wafer manufacturing

May 4th 2020 at 1:20 AM

1. Brief Introduction of Monocrystalline Silicon Materials for Semiconductor Grade Etching


Semiconductor level single crystal silicon material is an important basic material in the integrated circuit industry chain. According to its application field, it can be divided into single crystal silicon material for chips and single crystal silicon material for etching. The chip manufacturing process is complex and complex. Among them, thin film deposition, photolithography, and etching are the three main process steps of chip manufacturing. The single crystal silicon material for etching is mainly used for processing to make single crystal silicon parts for etching, and the single crystal for etching silicon components are the core consumables required in the etching process of wafer manufacturing.


2.The semiconductor level monocrystalline silicon material industry situation


(1) Semiconductor materials: the cornerstone of the development of the semiconductor industry


From 2016 to 2018, the global semiconductor industry is in the upward stage of the industry cycle, and the industry boom is relatively high, driving the growth of demand for semiconductor materials, especially silicon materials. Since 2019, the demand in the end market has slowed down, leading to a slowdown or a reduction in the growth rate of the semiconductor material industry market. However, in the long run, the global semiconductor industry is still in a spiraling development trend.


From the perspective of global competition, the global semiconductor materials industry is still dominated by Japan, the United States, South Korea, Taiwan, Germany and other countries and regions. With the continuous development of the domestic economy and the country's strong support for the semiconductor industry, China's integrated circuit industry has developed rapidly. Although there are still gaps between domestic semiconductor materials companies and global industry superior companies, the overall industry scale and technical level have been significantly Promote.


As the direct upstream of the semiconductor industry, the semiconductor material industry is the cornerstone of technological progress in the semiconductor industry. Semiconductor materials are mainly used in wafer manufacturing and packaging. According to SEMI statistics, global semiconductor material sales reached US $ 51.9 billion in 2018, of which the semiconductor manufacturing materials market size was US $ 32.2 billion and the packaging material market size was US $ 19.7 billion.


(2) Semiconductor silicon materials: one of the core raw materials in semiconductor manufacturing, with high technical barriers


The semiconductor silicon material industry scale accounts for more than 30% of the semiconductor manufacturing material scale and is the most important raw material in semiconductor manufacturing. Silicon materials have excellent properties such as unidirectional electrical conductivity, thermal sensitivity, optoelectronics, and doping characteristics. They can be grown into large-size, high-purity single crystals at moderate prices, and thus have become an important integrated circuit basic material widely used worldwide.


Semiconductor silicon materials are mainly single crystal silicon materials. According to application scenarios, semiconductor silicon materials can be divided into single crystal silicon materials for chips and single crystal silicon materials for etching.


Among them, the single-crystal silicon material for chips is the basic raw material for manufacturing semiconductor devices. The single-crystal silicon material for chips forms a very small circuit structure through a series of wafer manufacturing processes, and then becomes a chip through links such as cutting, packaging, and testing, and is widely used In the downstream market of integrated circuits. The single crystal silicon material used for etching is processed into single crystal silicon components for etching. The latter is the core consumable required for the etching process of wafer manufacturing. At present, the company's main products are single crystal silicon materials for etching.


The semiconductor grade monocrystalline silicon material industry has high technical barriers, high monopoly and market concentration. From a global perspective, Japan is the world's largest producer of semiconductor-grade single-crystal silicon materials, and its semiconductor-grade single-crystal silicon materials industry maintains a leading edge. In addition, South Korea, the United States, and Taiwan also occupy a certain proportion of market share. With the large-scale transfer of the semiconductor integrated circuit industry globally, China's semiconductor grade monocrystalline silicon material industry has also developed rapidly.


(3) Single crystal silicon material for etching


The single crystal silicon material for etching is mainly used to process the silicon electrode on the etching equipment. Since the silicon electrode is etched on the silicon oxide film and other processing processes, it will be gradually etched and thinned. When the thickness of the silicon electrode is reduced to a certain level. After the degree, the new silicon electrode needs to be replaced, so the silicon electrode is the core consumable of the wafer manufacturing etching process.


The current chip manufacturing process widely uses dry etching technology. The single crystal silicon material for etching is processed by downstream customers to make a single crystal silicon component for etching, which is finally used in the etching process of integrated circuits. Etching is a process to remove the surface material of the wafer to meet the design requirements of integrated circuits. At present, the dry etching process is widely used in the chip manufacturing process. Dry etching uses the developed photoresist pattern as a mask to etch away a certain depth of thin film material on the substrate, and then obtains the same integrated circuit pattern as the photoresist pattern.


The growth rate of silicon single crystal polishing wafers will be stable in the future. Silicon polished wafers are the basic materials for integrated circuit wafer production. Compared with other silicon material industries, silicon polished wafer production requires higher integration of technology, pens, and intellectual resources. The industry relies on high-precision technical equipment and cutting-edge technology research and development capabilities. . The production process of single crystal silicon polishing wafers mainly includes the following processes: single crystal growth → cutting → outer diameter barrel grinding → flat edge or V-groove processing → slice chamfering → grinding corrosion → polishing → cleaning → packaging.


The single crystal silicon rod is the raw material for manufacturing chips, and the 8-inch single crystal silicon polishing sheet is the main material for manufacturing 16MB ~ 64MB memory. The domestic polishing pad market has a broad development space. According to the National Bureau of Statistics, the industry growth rate is expected to maintain a growth rate of over 7% in the next few years. By 2022, the market size of China's silicon polishing pad industry will reach 13.344 billion yuan.

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